Hitoshi Katoh
5Patents
3h-index
12Co-inventors
54Inventor score
Filing activity: Jun 6, 1984 → Nov 22, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4623751A | Photovoltaic device and its manufacturing method | Emerging Cross-Sectional Technologies | 16 | Expired |
| US7125812B2 | CVD method and device for forming silicon-containing insulation film | Chemistry; Metallurgy | 6 | Expired |
| US5305313A | Electronic switching system for use in connection to an | Electricity | 5 | Expired |
| US9159548B2 | Semiconductor processing system including vaporizer and method for using same | Chemistry; Metallurgy | 1 | Active |
| US8298341B2 | Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus | Chemistry; Metallurgy | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.