Ian Smith
18Patents
13h-index
29Co-inventors
74Inventor score
Filing activity: Mar 10, 1997 → Dec 18, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7242477B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 83 | Expired |
| US6999614B1 | Power assisted automatic supervised classifier creation tool for semiconductor defects | Physics | 61 | Expired |
| US6710876B1 | Metrology system using optical phase | Physics | 56 | Expired |
| US7317531B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 49 | Expired |
| US7280212B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 34 | Expired |
| US7298481B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 34 | Expired |
| US7289213B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 33 | Expired |
| US7301634B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 24 | Expired |
| US7433040B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 22 | Active |
| US7385699B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 21 | Expired |
| US7379183B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 14 | Expired |
| US7564557B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 14 | Active |
| US5974351A | Multiplexed electronic control systems | Performing Operations; Transporting | 13 | Expired |
| US7663753B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 13 | Active |
| US7933016B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 12 | Active |
| US7361941B1 | Calibration standards and methods | Electricity | 9 | Expired |
| US7659126B1 | Electrical test method and apparatus | Electricity | 7 | Active |
| US7876440B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 6 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.