Apparatus and methods for detecting overlay errors using scatterometry

US7385699B2 · kind B2 · utility

Assignee

• KLA-Tencor Technologies Corp. · US

Inventors

• Walter D. Mieher · Los Gatos, US
• Ady Levy · Sunnyvale, US
• Boris Golovanesky · Haifa, IL
• Michael Friedmann · Nesher, IL
• Ian Smith · Los Gatos, US
• Michael Adel · Zichron Ya'akov, IL
• Anatoly Fabrikant · Fremont, US
• Christopher F. Bevis · Los Gatos, US
• Mark Ghinovker · Migdal HaEmek, IL

Key dates

• Filing date: Feb 23, 2004
• Grant date: Jun 10, 2008
• Expiry date: Mar 26, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed is a method for determining an overlay error between at least two layers in a multiple layer sample. An imaging optical system is used to measure a plurality of measured optical signals from a plurality of periodic targets on the sample. The targets each have a first structure in a first layer and a second structure in a second layer. There are predefined offsets between the first and second structures. A scatterometry overlay technique is then used to analyze the measured optical signals of the periodic targets and the predefined offsets of the first and second structures of the periodic targets to thereby determine an overlay error between the first and second structures of the periodic targets.