Inventor · Futtsu, JP

Isao Hamaguchi

5Patents
5h-index
12Co-inventors
52Inventor score

Filing activity: Sep 26, 1995 → May 15, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US7204887B2 Wafer holding, wafer support member, wafer boat and heat treatment furnace Emerging Cross-Sectional Technologies 544 Expired
US5918151A Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same Electricity 10 Expired
US6617034B1 SOI substrate and method for production thereof Electricity 7 Expired
US5534446A Process for producing buried insulator layer in semiconductor substrate Emerging Cross-Sectional Technologies 7 Expired
US7084459B2 SOI substrate Electricity 7 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.