Inventor · Kumamoto, JP

Isao Mita

3Patents
0h-index
4Co-inventors
24Inventor score

Filing activity: Mar 8, 2011 → May 16, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US8765353B2 Resist composition and method for producing semiconductor device Electricity 0 Active
US9304399B2 Resist composition and method for producing semiconductor device Electricity 0 Active
US8697342B2 Method of modifying chemically amplified resist pattern, modifier for chemically amplified resist pattern, and resist pattern structure Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.