Inventor · Westford, MA, US

J. Casey Donaher

7Patents
2h-index
13Co-inventors
48Inventor score

Filing activity: Sep 6, 1994 → Aug 20, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5483345A Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object Physics 12 Expired
US8395783B2 System metrology core Physics 6 Active
US8760624B2 System and method for estimating field curvature Physics 2 Active
US11126096B2 System and method for optimizing a lithography exposure process Physics 1 Active
US11531279B2 System and method for optimizing a lithography exposure process Physics 0 Active
US9625832B2 Planar motor system with increased efficiency Electricity 0 Active
US11353800B2 Conformal stage Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.