Inventor · San Jose, CA, US

Jae-Chull Lee

7Patents
5h-index
7Co-inventors
48Inventor score

Filing activity: Jan 6, 2006 → Feb 22, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US7665951B2 Multiple slot load lock chamber and method of operation Emerging Cross-Sectional Technologies 38 Active
US7845891B2 Decoupled chamber body Emerging Cross-Sectional Technologies 22 Active
US7497414B2 Curved slit valve door with flexible coupling Electricity 11 Active
US7822324B2 Load lock chamber with heater in tube Electricity 8 Active
US8061949B2 Multiple slot load lock chamber and method of operation Emerging Cross-Sectional Technologies 7 Active
US8124907B2 Load lock chamber with decoupled slit valve door seal compartment Electricity 5 Active
US7845618B2 Valve door with ball coupling Mechanical Engineering; Lighting; Heating 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.