Valve door with ball coupling
US7845618B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2007 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Mar 9, 2029 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K1/24
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member coupled to an actuator by a ball joint. The ball joint is configured to allow movement of the door member relative to the lever arm around a center of the ball joint. In one embodiment, a sealing face of the elongated door is curved. In another embodiment, the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a metrology chamber, a thermal processing chamber, or a physical vapor disposition chamber, a load lock chamber, a substrate transfer chamber or a vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.