Curved slit valve door with flexible coupling
US7497414B2 · kind B2 · utility
11Cited by
157References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2006 |
| Grant date | Mar 3, 2009 |
| Priority date | — |
| Expiry date | Jan 12, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67201
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a concave sealing face coupled to an actuator by a flexible coupling. The flexible coupling configured to allow movement of the door member relative to the lever arm in at least two planes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.