Decoupled chamber body
US7845891B2 · kind B2 · utility
22Cited by
168References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2006 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Jan 10, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock chamber, substrate transfer chamber and vacuum processing chambers, among others.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.