Jiale Su
4Patents
0h-index
3Co-inventors
27Inventor score
Filing activity: Sep 3, 2013 → May 26, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9939724B2 | Photolithography method and system based on high step slope | Physics | 0 | Active |
| US12022270B2 | MEMS microphone and preparation method therefor | Electricity | 0 | Active |
| US9371224B2 | Silicon etching method | Performing Operations; Transporting | 0 | Active |
| US10816903B2 | Photolithography method and system based on high step slope | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.