Inventor · Aalen, DE

Joerg Schultz

7Patents
4h-index
18Co-inventors
46Inventor score

Filing activity: Jul 14, 2004 → Aug 25, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US7511886B2 Optical beam transformation system and illumination system comprising an optical beam transformation system Physics 56 Expired
US7186983B2 Illumination system particularly for microlithography Physics 9 Expired
US7977651B2 Illumination system particularly for microlithography Physics 4 Active
US7348565B2 Illumination system particularly for microlithography Physics 4 Active
US7456408B2 Illumination system particularly for microlithography Physics 3 Active
US7592598B2 Illumination system particularly for microlithography Physics 1 Active
US7551361B2 Lithography lens system and projection exposure system provided with at least one lithography lens system of this type Physics 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.