Joern WEBER
8Patents
1h-index
31Co-inventors
47Inventor score
Filing activity: Jul 22, 2011 → Dec 22, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9453749B1 | Hybrid sensing ultrasonic flowmeter | Physics | 11 | Active |
| US8928972B2 | Reflective optical element for EUV lithography | Physics | 1 | Active |
| US10061205B2 | Reflective optical element | Physics | 1 | Active |
| US9915873B2 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Physics | 0 | Active |
| US9494718B2 | Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective | Physics | 0 | Active |
| US12406777B2 | Optical element for a EUV projection exposure system | Physics | 0 | Active |
| US11328831B2 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Physics | 0 | Active |
| US8937709B2 | Reflective optical element for EUV lithography | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.