John D. Greene
12Patents
9h-index
57Co-inventors
75Inventor score
Filing activity: Feb 19, 1988 → Apr 27, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5502306A | Electron beam inspection system and method | Electricity | 259 | Expired |
| US4877326A | Method and apparatus for optical inspection of substrates | Physics | 185 | Expired |
| US8664594B1 | Electron-optical system for high-speed and high-sensitivity inspections | Electricity | 102 | Active |
| US5131755A | Automatic high speed optical inspection system | Physics | 61 | Expired |
| US5085517A | Automatic high speed optical inspection system | Physics | 43 | Expired |
| US8362425B2 | Multiple-beam system for high-speed electron-beam inspection | Electricity | 39 | Active |
| US7253410B1 | Charge-control pre-scanning for e-beam imaging | Electricity | 27 | Expired |
| US6833913B1 | Apparatus and methods for optically inspecting a sample for anomalies | Physics | 20 | Expired |
| USRE37740E1 | Method and apparatus for optical inspection of substrates | General | 12 | Expired |
| US7012683B2 | Apparatus and methods for optically inspecting a sample for anomalies | Physics | 6 | Expired |
| US8294125B2 | High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture | Electricity | 6 | Active |
| US9780004B2 | Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspection | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.