Inventor · Santa Cruz, CA, US

John D. Greene

12Patents
9h-index
57Co-inventors
75Inventor score

Filing activity: Feb 19, 1988 → Apr 27, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US5502306A Electron beam inspection system and method Electricity 259 Expired
US4877326A Method and apparatus for optical inspection of substrates Physics 185 Expired
US8664594B1 Electron-optical system for high-speed and high-sensitivity inspections Electricity 102 Active
US5131755A Automatic high speed optical inspection system Physics 61 Expired
US5085517A Automatic high speed optical inspection system Physics 43 Expired
US8362425B2 Multiple-beam system for high-speed electron-beam inspection Electricity 39 Active
US7253410B1 Charge-control pre-scanning for e-beam imaging Electricity 27 Expired
US6833913B1 Apparatus and methods for optically inspecting a sample for anomalies Physics 20 Expired
USRE37740E1 Method and apparatus for optical inspection of substrates General 12 Expired
US7012683B2 Apparatus and methods for optically inspecting a sample for anomalies Physics 6 Expired
US8294125B2 High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture Electricity 6 Active
US9780004B2 Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspection Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.