Inventor · Los Altos, CA, US

John Hearne

10Patents
9h-index
22Co-inventors
64Inventor score

Filing activity: Jun 14, 1993 → Apr 22, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US5884640A Method and apparatus for drying substrates Emerging Cross-Sectional Technologies 484 Expired
US6701381B2 Data processing system and development method Physics 58 Expired
US5745946A Substrate processing system Emerging Cross-Sectional Technologies 52 Expired
US5566466A Spindle assembly with improved wafer holder Emerging Cross-Sectional Technologies 48 Expired
US6348124B1 Delivery of polishing agents in a wafer processing system Physics 47 Expired
US5727332A Contamination control in substrate processing system Electricity 28 Expired
US6027574A Method of drying a substrate by lowering a fluid surface level Emerging Cross-Sectional Technologies 25 Expired
US5358760A Process for producing solid bricks from fly ash, bottom ash, lime, gypsum, and calcium carbonate Emerging Cross-Sectional Technologies 23 Expired
US6513848B1 Hydraulically actuated wafer clamp Emerging Cross-Sectional Technologies 18 Expired
US7086933B2 Flexible polishing fluid delivery system Performing Operations; Transporting 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.