John Hearne
10Patents
9h-index
22Co-inventors
64Inventor score
Filing activity: Jun 14, 1993 → Apr 22, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5884640A | Method and apparatus for drying substrates | Emerging Cross-Sectional Technologies | 484 | Expired |
| US6701381B2 | Data processing system and development method | Physics | 58 | Expired |
| US5745946A | Substrate processing system | Emerging Cross-Sectional Technologies | 52 | Expired |
| US5566466A | Spindle assembly with improved wafer holder | Emerging Cross-Sectional Technologies | 48 | Expired |
| US6348124B1 | Delivery of polishing agents in a wafer processing system | Physics | 47 | Expired |
| US5727332A | Contamination control in substrate processing system | Electricity | 28 | Expired |
| US6027574A | Method of drying a substrate by lowering a fluid surface level | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5358760A | Process for producing solid bricks from fly ash, bottom ash, lime, gypsum, and calcium carbonate | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6513848B1 | Hydraulically actuated wafer clamp | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7086933B2 | Flexible polishing fluid delivery system | Performing Operations; Transporting | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.