John Michael Kerns
6Patents
3h-index
24Co-inventors
49Inventor score
Filing activity: Mar 12, 2013 → Oct 21, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9873940B2 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Emerging Cross-Sectional Technologies | 16 | Active |
| US9123651B2 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Emerging Cross-Sectional Technologies | 6 | Active |
| US9337002B2 | Corrosion resistant aluminum coating on plasma chamber components | Emerging Cross-Sectional Technologies | 6 | Active |
| US9546432B2 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Emerging Cross-Sectional Technologies | 3 | Active |
| US12249490B2 | Single crystal metal oxide plasma chamber component | Electricity | 0 | Active |
| US12270748B2 | Method and apparatus for measuring particles | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.