Method and apparatus for measuring particles
US12270748B2 · kind B2 · utility
0Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2019 |
| Grant date | Apr 8, 2025 |
| Priority date | — |
| Expiry date | Jun 3, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1486
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring contamination on a critical surface of a part is provided. A vessel for mounting the part is provided. An inert gas source is in fluid connection with the vessel and adapted to provide an inert gas to the vessel. At least one diffuser receives the inert gas from the vessel, wherein the critical surface of the part is exposed to the inert gas when the part is mounted in the vessel. At least one analyzer is adapted to receive inert gas from the at least one diffuser and measures contaminants in the inert gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.