Inventor · Birkenfeld, DE

Jorg Thiele

7Patents
3h-index
15Co-inventors
46Inventor score

Filing activity: Sep 28, 1999 → Aug 27, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6745380B2 Method for optimizing and method for producing a layout for a mask, preferably for use in semiconductor production, and computer program therefor Physics 181 Expired
US6493865B2 Method of producing masks for fabricating semiconductor structures Physics 3 Expired
US6692875B2 Mask for optical projection systems, and a process for its production Physics 3 Expired
US7393613B2 Set of at least two masks for the projection of structure patterns Physics 2 Expired
US7393614B2 Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer Physics 1 Expired
US6562664B1 Method for installing protective components in integrated circuits that are constructed from standard cells Electricity 0 Expired
US7354683B2 Lithography mask for imaging of convex structures Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.