Joseph Lanucha
4Patents
4h-index
5Co-inventors
36Inventor score
Filing activity: Mar 15, 1993 → Nov 20, 1995
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5456796A | Control of particle generation within a reaction chamber | Emerging Cross-Sectional Technologies | 47 | Expired |
| US5423918A | Method for reducing particulate contamination during plasma processing of semiconductor devices | Electricity | 23 | Expired |
| US5410122A | Use of electrostatic forces to reduce particle contamination in semiconductor plasma processing chambers | Electricity | 20 | Expired |
| US5622595A | Reducing particulate contamination during semiconductor device processing | Emerging Cross-Sectional Technologies | 19 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.