Jun-Yih Yu
7Patents
0h-index
11Co-inventors
34Inventor score
Filing activity: Sep 30, 2015 → Nov 15, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11003089B2 | Method and apparatus for dynamic lithographic exposure | Physics | 0 | Active |
| US11520237B2 | Method and apparatus for dynamic lithographic exposure | Physics | 0 | Active |
| US10274830B2 | Method and apparatus for dynamic lithographic exposure | Physics | 0 | Active |
| US11880140B2 | Method and apparatus for dynamic lithographic exposure | Electricity | 0 | Active |
| US10948816B2 | Pellicle frame and pellicle | Chemistry; Metallurgy | 0 | Active |
| US10649336B2 | Method and system for fabricating semiconductor device | Electricity | 0 | Active |
| US10663868B2 | Method and apparatus for dynamic lithographic exposure | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.