Inventor · Yokosuka, JP

Junji Sugamoto

12Patents
6h-index
25Co-inventors
58Inventor score

Filing activity: Mar 20, 2002 → Jul 10, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US7057259B2 Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Emerging Cross-Sectional Technologies 18 Expired
US7221991B2 System and method for monitoring manufacturing apparatuses Emerging Cross-Sectional Technologies 13 Expired
US7324855B2 Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server Emerging Cross-Sectional Technologies 10 Expired
US7700381B2 Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Emerging Cross-Sectional Technologies 7 Active
US7529631B2 Defect detection system, defect detection method, and defect detection program Emerging Cross-Sectional Technologies 7 Active
US7314766B2 Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus Electricity 6 Expired
US7742834B2 Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same Emerging Cross-Sectional Technologies 4 Active
US7970486B2 Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus Emerging Cross-Sectional Technologies 1 Active
US7596421B2 Process control system, process control method, and method of manufacturing electronic apparatus Emerging Cross-Sectional Technologies 0 Active
US7979154B2 Method and system for managing semiconductor manufacturing device Emerging Cross-Sectional Technologies 0 Active
US7831330B2 Process control system, process control method, and method of manufacturing electronic apparatus Emerging Cross-Sectional Technologies 0 Active
US7531462B2 Method of inspecting semiconductor wafer Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.