Junji Sugamoto
12Patents
6h-index
25Co-inventors
58Inventor score
Filing activity: Mar 20, 2002 → Jul 10, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7057259B2 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7221991B2 | System and method for monitoring manufacturing apparatuses | Emerging Cross-Sectional Technologies | 13 | Expired |
| US7324855B2 | Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7700381B2 | Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them | Emerging Cross-Sectional Technologies | 7 | Active |
| US7529631B2 | Defect detection system, defect detection method, and defect detection program | Emerging Cross-Sectional Technologies | 7 | Active |
| US7314766B2 | Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus | Electricity | 6 | Expired |
| US7742834B2 | Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same | Emerging Cross-Sectional Technologies | 4 | Active |
| US7970486B2 | Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US7596421B2 | Process control system, process control method, and method of manufacturing electronic apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US7979154B2 | Method and system for managing semiconductor manufacturing device | Emerging Cross-Sectional Technologies | 0 | Active |
| US7831330B2 | Process control system, process control method, and method of manufacturing electronic apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US7531462B2 | Method of inspecting semiconductor wafer | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.