Junzo Azuma
9Patents
4h-index
17Co-inventors
50Inventor score
Filing activity: Jun 8, 2001 → May 27, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6734687B1 | Apparatus for detecting defect in device and method of detecting defect | Physics | 113 | Expired |
| US6960765B2 | Probe driving method, and probe apparatus | Physics | 28 | Expired |
| US6970004B2 | Apparatus for inspecting defects of devices and method of inspecting defects | Physics | 8 | Expired |
| US7301146B2 | Probe driving method, and probe apparatus | Physics | 5 | Active |
| US8442300B2 | Specified position identifying method and specified position measuring apparatus | Physics | 3 | Active |
| US9099281B2 | Charged particle radiation apparatus, and method for displaying three-dimensional information in charged particle radiation apparatus | Electricity | 1 | Active |
| US12198892B2 | Sample holder and charged particle beam apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US11600463B2 | Cross-section observation device, and control method | Electricity | 0 | Active |
| US8399863B2 | Charged particle beam apparatus using an electrostatic lens gun | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.