Charged particle radiation apparatus, and method for displaying three-dimensional information in charged particle radiation apparatus
US9099281B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2010 |
| Grant date | Aug 4, 2015 |
| Priority date | — |
| Expiry date | Jul 22, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2611
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.