Kai-Fa Ho
8Patents
2h-index
12Co-inventors
44Inventor score
Filing activity: Dec 16, 2011 → Aug 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8616539B2 | Track spin wafer chuck | Emerging Cross-Sectional Technologies | 4 | Active |
| US11822256B2 | Semiconductor processing tool and methods of operation | Physics | 2 | Active |
| US9574875B2 | Wafer or reticle thermal deformation measuring techniques | Physics | 1 | Active |
| US11809087B2 | Semiconductor processing tool and methods of operation | Physics | 0 | Active |
| US12298672B2 | Semiconductor processing tool and methods of operation | Physics | 0 | Active |
| US11195743B2 | Adjustable substrate support and adjustment method | Electricity | 0 | Active |
| US12265336B2 | Semiconductor processing tool and methods of operation | Physics | 0 | Active |
| US12111583B2 | Semiconductor processing tool and methods of operation | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.