Katsuaki Aoki
5Patents
2h-index
16Co-inventors
44Inventor score
Filing activity: Jan 13, 1998 → Mar 24, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5955382A | Microwave excitation plasma processing apparatus and microwave excitation plasma processing method | Electricity | 13 | Expired |
| US6333246A | Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system | Electricity | 9 | Expired |
| US8021565B2 | Surface treatment method, etching method, and method for manufacturing electronic device | Emerging Cross-Sectional Technologies | 1 | Active |
| US6368977B1 | Semiconductor device manufacturing method | Electricity | 1 | Expired |
| US7833911B2 | Method of manufacturing semiconductor device, apparatus of manufacturing semiconductor device and semiconductor device | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.