Inventor · Shinjuku, JP

Katsuyuki Iwata

12Patents
5h-index
26Co-inventors
62Inventor score

Filing activity: Dec 16, 1997 → Jan 12, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US6059885A Vapor deposition apparatus and method for forming thin film Chemistry; Metallurgy 182 Expired
US8783063B2 Glass substrate for magnetic disk and manufacturing method of the same Physics 51 Active
US6113705A High-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film method Chemistry; Metallurgy 31 Expired
US6250914A Wafer heating device and method of controlling the same Electricity 10 Expired
US6025596A Method for measuring epitaxial film thickness of multilayer epitaxial wafer Physics 10 Expired
US8119267B2 Glass substrate for magnetic disk and manufacturing method of the same Physics 5 Active
US8652660B2 Glass substrate for magnetic recording medium and its use Physics 3 Active
US6461428B2 Method and apparatus for controlling rise and fall of temperature in semiconductor substrates Chemistry; Metallurgy 2 Expired
US6132519A Vapor deposition apparatus and vapor deposition method Electricity 2 Expired
US6485573B2 Apparatus for reduced-pressure epitaxial growth and method of controlling the apparatus Chemistry; Metallurgy 0 Expired
US8613206B2 Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk Chemistry; Metallurgy 0 Active
US8413464B2 Method for producing glass substrate for magnetic disk and method for producing magnetic disk Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.