Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus
US7085628B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 22, 2002 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Nov 16, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor between an orifice and a control valve, to control flow rate through the orifice by a regulating control valve, while calculating the flow from the upstream side pressure. With a temperature sensor, a memory means, and a temperature drift correcting means which calculates drift of the upstream side pressure sensor from data in the memory means when the temperature of the fluid changes and offsets the output drift of the upstream side pressure sensor with the calculated amount of the output drift, temperature drift of the pressure sensor is automatically corrected, enabling accurate control of flow rate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.