Kazutoshi Ishimaru
5Patents
2h-index
21Co-inventors
47Inventor score
Filing activity: Jun 3, 2004 → Oct 4, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6973370B2 | Substrate processing apparatus and method for adjusting a substrate transfer position | Emerging Cross-Sectional Technologies | 13 | Expired |
| US10840213B2 | Bonding system | Electricity | 4 | Active |
| US10879100B2 | Substrate transfer device, substrate transfer method and recording medium | Electricity | 2 | Active |
| US10424502B2 | Substrate transfer device and bonding system | Emerging Cross-Sectional Technologies | 1 | Active |
| US11257701B2 | Substrate processing apparatus, substrate processing method and recording medium | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.