Kazuya Kadota
5Patents
5h-index
31Co-inventors
59Inventor score
Filing activity: Jun 10, 1986 → Nov 25, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5734188A | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Electricity | 37 | Expired |
| US5264712A | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Electricity | 21 | Expired |
| US5917211A | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Electricity | 21 | Expired |
| US4835089A | Resist pattern forming process with dry etching | Physics | 14 | Expired |
| US4738910A | Method of applying a resist | Emerging Cross-Sectional Technologies | 10 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.