Kazuyoshi Yaguchi
3Patents
1h-index
3Co-inventors
30Inventor score
Filing activity: Jun 22, 2006 → Apr 24, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8883652B2 | Silicon etching liquid and etching method | Performing Operations; Transporting | 1 | Active |
| US8658053B2 | Etching composition for metal material and method for manufacturing semiconductor device by using same | Electricity | 0 | Active |
| US8562855B2 | Silicon etching liquid and etching method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.