Inventor · Cupertino, CA, US

Ke Ling Lee

9Patents
4h-index
12Co-inventors
50Inventor score

Filing activity: Apr 8, 1998 → Oct 1, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US6015465A Temperature control system for semiconductor process chamber Electricity 630 Expired
US7086638B2 Methods and apparatus for sealing an opening of a processing chamber Mechanical Engineering; Lighting; Heating 16 Expired
US6264804A System and method for handling and masking a substrate in a sputter deposition system Chemistry; Metallurgy 14 Expired
US7469715B2 Chamber isolation valve RF grounding Emerging Cross-Sectional Technologies 6 Active
US6413381B1 Horizontal sputtering system Chemistry; Metallurgy 3 Expired
US8327878B2 Chamber isolation valve RF grounding Emerging Cross-Sectional Technologies 2 Active
US6406598B2 System and method for transporting and sputter coating a substrate in a sputter deposition system Chemistry; Metallurgy 2 Expired
US8565366B2 Methods and apparatuses for operating and repairing nuclear reactors Emerging Cross-Sectional Technologies 0 Active
US9959943B2 Method and apparatuses for operating and repairing nuclear reactors Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.