Ke Ling Lee
9Patents
4h-index
12Co-inventors
50Inventor score
Filing activity: Apr 8, 1998 → Oct 1, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6015465A | Temperature control system for semiconductor process chamber | Electricity | 630 | Expired |
| US7086638B2 | Methods and apparatus for sealing an opening of a processing chamber | Mechanical Engineering; Lighting; Heating | 16 | Expired |
| US6264804A | System and method for handling and masking a substrate in a sputter deposition system | Chemistry; Metallurgy | 14 | Expired |
| US7469715B2 | Chamber isolation valve RF grounding | Emerging Cross-Sectional Technologies | 6 | Active |
| US6413381B1 | Horizontal sputtering system | Chemistry; Metallurgy | 3 | Expired |
| US8327878B2 | Chamber isolation valve RF grounding | Emerging Cross-Sectional Technologies | 2 | Active |
| US6406598B2 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Chemistry; Metallurgy | 2 | Expired |
| US8565366B2 | Methods and apparatuses for operating and repairing nuclear reactors | Emerging Cross-Sectional Technologies | 0 | Active |
| US9959943B2 | Method and apparatuses for operating and repairing nuclear reactors | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.