Keiko Emi
7Patents
5h-index
6Co-inventors
48Inventor score
Filing activity: Jul 28, 2006 → Dec 13, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7511290B2 | Charged particle beam writing method and apparatus | Electricity | 10 | Active |
| US7525110B2 | Multiple irradiation effect-corrected dose determination technique for charged particle beam lithography | Performing Operations; Transporting | 10 | Active |
| US7740991B2 | Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam | Electricity | 9 | Active |
| US8103980B2 | Beam dose computing method and writing method and record carrier body and writing apparatus | Electricity | 8 | Active |
| US7669174B2 | Pattern generation method and charged particle beam writing apparatus | Electricity | 6 | Active |
| US7619230B2 | Charged particle beam writing method and apparatus and readable storage medium | Electricity | 5 | Active |
| US8352889B2 | Beam dose computing method and writing method and record carrier body and writing apparatus | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.