Kenji Saitoh
79Patents
19h-index
76Co-inventors
87Inventor score
Filing activity: Dec 15, 1986 → Sep 3, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5721721A | Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium | Emerging Cross-Sectional Technologies | 66 | Expired |
| US5625453A | System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating | Physics | 64 | Expired |
| US5114236A | Position detection method and apparatus | Physics | 64 | Expired |
| US5148036A | Multi-axis wafer position detecting system using a mark having optical power | Electricity | 63 | Expired |
| US5327221A | Device for detecting positional relationship between two objects | Physics | 62 | Expired |
| US5483343A | Wavelength compensator in a helium ambience | Physics | 57 | Expired |
| US5519686A | Encoder for controlling measurements in the range of a few angstroms | Emerging Cross-Sectional Technologies | 49 | Expired |
| US5333050A | Measuring method and apparatus for meausring the positional relationship of first and second gratings | Physics | 48 | Expired |
| US7217503B2 | Exposure method and apparatus | Physics | 47 | Expired |
| US5891773A | Non-volatile semiconductor storage apparatus and production thereof | Electricity | 40 | Expired |
| US7075455B2 | Wireless communication apparatus and method | Electricity | 39 | Expired |
| US5369486A | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Physics | 36 | Expired |
| US4895914A | Surface treated polymethylsilsesquioxane powder | Emerging Cross-Sectional Technologies | 33 | Expired |
| US7107573B2 | Method for setting mask pattern and illumination condition | Physics | 28 | Expired |
| US5524131A | Alignment apparatus and SOR x-ray exposure apparatus having same | Physics | 28 | Expired |
| US5200800A | Position detecting method and apparatus | Physics | 27 | Expired |
| US5162656A | Position detecting device employing marks and oblique projection | Physics | 25 | Expired |
| US5610718A | Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes | Physics | 23 | Expired |
| US6154281A | Position detecting system and device manufacturing method using the same | Physics | 20 | Expired |
| US5682239A | Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters | Physics | 19 | Expired |
| US6534242B2 | Multiple exposure device formation | Physics | 19 | Expired |
| US7901098B2 | Illuminating apparatus and image sensing system including illuminating apparatus | Physics | 18 | Active |
| US6157452A | Position detecting apparatus | Physics | 18 | Expired |
| US5822389A | Alignment apparatus and SOR X-ray exposure apparatus having same | Physics | 18 | Expired |
| US5313272A | Method and apparatus for measuring deviation between patterns on a semiconductor wafer | Physics | 18 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.