Kenji Tago
6Patents
5h-index
15Co-inventors
56Inventor score
Filing activity: Mar 7, 1994 → Jun 30, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5556275A | Heat treatment apparatus | Electricity | 353 | Expired |
| US5536320A | Processing apparatus | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6156121A | Wafer boat and film formation method | Electricity | 10 | Expired |
| US6344387B1 | Wafer boat and film formation method | Electricity | 8 | Expired |
| US7700156B2 | Method and apparatus for forming silicon oxide film | Electricity | 5 | Active |
| US6925731B2 | Thin film forming apparatus cleaning method | Chemistry; Metallurgy | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.