Kimiya Aoki
8Patents
4h-index
17Co-inventors
50Inventor score
Filing activity: Aug 30, 1999 → Jul 1, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6869892B1 | Method of oxidizing work pieces and oxidation system | Electricity | 16 | Expired |
| US8122850B2 | Method and apparatus for processing polysilazane film | Electricity | 7 | Active |
| US7304003B2 | Oxidizing method and oxidizing unit for object to be processed | Electricity | 5 | Expired |
| US7700156B2 | Method and apparatus for forming silicon oxide film | Electricity | 5 | Active |
| US6245673A | Method of forming tungsten silicide film | Electricity | 4 | Expired |
| US7064084B2 | Oxide film forming method | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7563481B2 | Method and apparatus for processing polysilazane film | Electricity | 1 | Active |
| US7926445B2 | Oxidizing method and oxidizing unit for object to be processed | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.