Kisang Eum
4Patents
0h-index
10Co-inventors
31Inventor score
Filing activity: Oct 14, 2016 → Sep 2, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10153137B2 | Support unit, substrate treating apparatus including the same, and method for treating a substrate | Electricity | 0 | Active |
| US10930538B2 | Substrate alignment apparatus, substrate processing apparatus, and substrate processing method | Electricity | 0 | Active |
| US12055866B2 | Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus | Performing Operations; Transporting | 0 | Active |
| US10529594B2 | Apparatus and method for treating substrate | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.