Inventor · Cheonan-si, KR

Kisang Eum

4Patents
0h-index
10Co-inventors
31Inventor score

Filing activity: Oct 14, 2016 → Sep 2, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10153137B2 Support unit, substrate treating apparatus including the same, and method for treating a substrate Electricity 0 Active
US10930538B2 Substrate alignment apparatus, substrate processing apparatus, and substrate processing method Electricity 0 Active
US12055866B2 Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus Performing Operations; Transporting 0 Active
US10529594B2 Apparatus and method for treating substrate Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.