Kiyoshi Arakawa
7Patents
5h-index
2Co-inventors
45Inventor score
Filing activity: Jan 6, 1999 → Jul 22, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6757048B2 | Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory | Physics | 34 | Expired |
| US6356338B2 | Semiconductor production system with an in-line subsystem | Physics | 13 | Expired |
| US7057701B2 | Exposure apparatus | Physics | 8 | Expired |
| US6891593B2 | Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory | Physics | 5 | Expired |
| US6924877B2 | Chemical filter arrangement for a semiconductor manufacturing apparatus | Mechanical Engineering; Lighting; Heating | 5 | Expired |
| US7034918B2 | Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory | Physics | 3 | Expired |
| US7186285B2 | Chemical filter arrangement for a semiconductor manufacturing apparatus | Mechanical Engineering; Lighting; Heating | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.