Knut Beekmann
4Patents
1h-index
11Co-inventors
41Inventor score
Filing activity: Aug 1, 1994 → Sep 22, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7309662B1 | Method and apparatus for forming a film on a substrate | Electricity | 1 | Expired |
| US7923383B2 | Method and apparatus for treating a semi-conductor substrate | Electricity | 1 | Expired |
| US5492737A | Deposition apparatus and method | Electricity | 0 | Expired |
| US7202167B2 | Method of forming a diffusion barrier | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.