Koji Ebara
7Patents
2h-index
6Co-inventors
40Inventor score
Filing activity: Jul 10, 2001 → Jan 7, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6589336B1 | Production method for silicon epitaxial wafer and silicon epitaxial wafer | Electricity | 10 | Expired |
| US6914442B2 | Method for measuring resistivity of semiconductor wafer | Physics | 2 | Expired |
| US8377202B2 | Method for manufacturing silicon wafer and silicon wafer manufactured by this method | Electricity | 1 | Active |
| US9252025B2 | Method for manufacturing silicon single crystal wafer and electronic device | Electricity | 0 | Active |
| US7839426B2 | Time recorder | Physics | 0 | Active |
| US10297463B2 | Method for manufacturing silicon wafer | Electricity | 0 | Active |
| US9390905B2 | Method for manufacturing silicon substrate and silicon substrate | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.