Kursat Bal
4Patents
2h-index
37Co-inventors
40Inventor score
Filing activity: Feb 29, 2012 → Dec 24, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8730448B2 | Lithographic apparatus and device manufacturing method | Physics | 6 | Active |
| US9513566B2 | Lithographic apparatus | Physics | 5 | Active |
| US8797504B2 | Lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US12332570B2 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.