Kyong-Nam Kim
6Patents
2h-index
8Co-inventors
36Inventor score
Filing activity: Apr 9, 2002 → Dec 11, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6818532B2 | Method of etching substrates | Electricity | 34 | Expired |
| US7012012B2 | Method of etching substrates | Electricity | 13 | Expired |
| US7842159B2 | Inductively coupled plasma processing apparatus for very large area using dual frequency | Electricity | 1 | Active |
| US7338577B2 | Inductively coupled plasma processing apparatus having internal linear antenna for large area processing | Electricity | 1 | Expired |
| US8293069B2 | Inductively coupled plasma apparatus | Electricity | 0 | Active |
| US8974630B2 | Inductively coupled plasma processing apparatus having internal linear antenna for large area processing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.