Lifu LI
6Patents
0h-index
15Co-inventors
34Inventor score
Filing activity: Dec 5, 2019 → Oct 24, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12308221B2 | Substrate processing system and method for installing edge ring | Electricity | 0 | Active |
| US11676800B2 | Substrate processing apparatus and control method of substrate processing apparatus | Electricity | 0 | Active |
| US11264248B2 | Etching method and substrate processing apparatus | Electricity | 0 | Active |
| US12217942B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US12148598B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US12387914B2 | Upper electrode assembly | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.