Lin Sha
5Patents
3h-index
9Co-inventors
46Inventor score
Filing activity: Nov 27, 2001 → Apr 23, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6845292B2 | Transfer apparatus and method for semiconductor process and semiconductor processing system | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7029505B2 | Sheet type heat treating apparatus and method for processing semiconductors | Electricity | 4 | Expired |
| US7927959B2 | Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded MIM capacitor using same, and embedded memory device produced thereby | Electricity | 3 | Active |
| US9224794B2 | Embedded memory device having MIM capacitor formed in excavated structure | Electricity | 1 | Active |
| US8441057B2 | Embedded memory device having MIM capacitor formed in excavated structure | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.