Lokesh Subramany
5Patents
2h-index
6Co-inventors
33Inventor score
Filing activity: Jul 29, 2013 → Aug 3, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9121890B2 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Electricity | 4 | Active |
| US9129905B2 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Electricity | 2 | Active |
| US9177873B2 | Systems and methods for fabricating semiconductor device structures | Electricity | 1 | Active |
| US9281249B2 | Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure | Physics | 0 | Active |
| US10121711B2 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.