Inventor · Radeberg, DE

Lothar Brencher

5Patents
1h-index
9Co-inventors
40Inventor score

Filing activity: Jan 3, 2001 → Sep 30, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6475919B2 Method for producing trenches for DRAM cell configurations Electricity 3 Expired
US9082719B2 Method for removing a dielectric layer from a bottom of a trench Electricity 1 Active
US8404597B2 Device and method for stopping an etching process Electricity 0 Active
US9305798B2 Device and method for stopping etching process Electricity 0 Active
US9543157B2 Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.