Lothar Brencher
5Patents
1h-index
9Co-inventors
40Inventor score
Filing activity: Jan 3, 2001 → Sep 30, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6475919B2 | Method for producing trenches for DRAM cell configurations | Electricity | 3 | Expired |
| US9082719B2 | Method for removing a dielectric layer from a bottom of a trench | Electricity | 1 | Active |
| US8404597B2 | Device and method for stopping an etching process | Electricity | 0 | Active |
| US9305798B2 | Device and method for stopping etching process | Electricity | 0 | Active |
| US9543157B2 | Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.