Maciek Orczyk
7Patents
7h-index
6Co-inventors
48Inventor score
Filing activity: Sep 12, 1996 → Mar 27, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5937323A | Sequencing of the recipe steps for the optimal low-k HDP-CVD processing | Electricity | 861 | Expired |
| US6217658A | Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing | Electricity | 794 | Expired |
| US5661093A | Method for the stabilization of halogen-doped films through the use of multiple sealing layers | Electricity | 320 | Expired |
| US6136685A | High deposition rate recipe for low dielectric constant films | Electricity | 295 | Expired |
| US6070550A | Apparatus for the stabilization of halogen-doped films through the use of multiple sealing layers | Electricity | 29 | Expired |
| US6228781A | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Electricity | 10 | Expired |
| US6375744B2 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.