Manabu Hamano
5Patents
3h-index
4Co-inventors
46Inventor score
Filing activity: Dec 31, 2007 → Aug 12, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7878562B2 | Semiconductor wafer carrier blade | Emerging Cross-Sectional Technologies | 11 | Active |
| US9401271B2 | Susceptor assemblies for supporting wafers in a reactor apparatus | Electricity | 5 | Active |
| US8940094B2 | Methods for fabricating a semiconductor wafer processing device | Emerging Cross-Sectional Technologies | 3 | Active |
| US9328420B2 | Gas distribution plate for chemical vapor deposition systems and methods of using same | Electricity | 1 | Active |
| US12084770B2 | Window for chemical vapor deposition systems and related methods | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.