Manfred Falter
3Patents
2h-index
11Co-inventors
37Inventor score
Filing activity: Sep 14, 2001 → Oct 15, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7977258B2 | Method and system for thermally processing a plurality of wafer-shaped objects | Electricity | 9 | Active |
| US6965093B2 | Device for thermally treating substrates | Electricity | 2 | Expired |
| US8450652B2 | Apparatus for thermally treating semiconductor substrates | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.