Manfred Schrenk
4Patents
3h-index
11Co-inventors
43Inventor score
Filing activity: Oct 11, 2000 → Sep 7, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7282701B2 | Sensor for use in a lithographic apparatus | Physics | 5 | Expired |
| US7453078B2 | Sensor for use in a lithographic apparatus | Physics | 4 | Active |
| US6324897A | Partial-pressure sensor | Physics | 4 | Expired |
| US8629418B2 | Lithographic apparatus and sensor therefor | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.