Inventor · Kahla, DE

Manfred Schrenk

4Patents
3h-index
11Co-inventors
43Inventor score

Filing activity: Oct 11, 2000 → Sep 7, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7282701B2 Sensor for use in a lithographic apparatus Physics 5 Expired
US7453078B2 Sensor for use in a lithographic apparatus Physics 4 Active
US6324897A Partial-pressure sensor Physics 4 Expired
US8629418B2 Lithographic apparatus and sensor therefor Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.