Manjunath Subbanna
5Patents
0h-index
20Co-inventors
37Inventor score
Filing activity: May 13, 2016 → Dec 20, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12091749B2 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Chemistry; Metallurgy | 0 | Active |
| US12428731B2 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Chemistry; Metallurgy | 0 | Active |
| US12018372B2 | Gas injector for epitaxy and CVD chamber | Chemistry; Metallurgy | 0 | Active |
| US12060651B2 | Chamber architecture for epitaxial deposition and advanced epitaxial film applications | Electricity | 0 | Active |
| US10403806B2 | Light emitting diode assembly using thermal pyrolytic graphite for thermal management | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.